Chapter 8. Lithography
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hlight3
Fig. 8-61.
Litho window
3. In the drop-down list, select the desired mode of lithography (Fig. 8-41):
● For charge lithography, select – Bias V;
● For current lithography, select – Current.
Fig. 8-62. Selecting the lithography method
4. For raster lithography, select Raster in the Mode drop-down list (Fig. 8-63).
Fig. 8-63. Selecting the lithography mode
8.3.2.3. Loading Template
The template can be loaded from an external file of raster format. We recommend to use
images of maximum contrast.
To load a lithography template, click the
button in the Control panel of the Litho
button (see Fig. 8-61). This will open the standard Open dialog. In this window, select the
desired file and click the Open button. The template image will appear in the Litho window
(Fig. 8-64).
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