NT-MDT Solver Next - Performing Lithography

Chapter 8. Lithography
187
8.2.3.4. Performing Lithography
When the lithography template is prepared (see i. 8.2.3.2 on p. 185) and the lithography
parameters are adjusted (see i. 8.2.3.3 on p. 186), the operator can start the lithography
process.
To start lithography, click the button in the Control panel of the Litho window.
This will change appearance of the Run button to . Below the Stop button, the
progress bar will appear to display percentage of the procedure progress in blue.
When the procedure completes, the Stop button returns to its initial appearance.
The lithography process can be stopped by clicking the
Stop button or by pressing the
<Esc> key. This will stop the prcess immediately. Next clicking the
Run button would start
the lithography procedure from the very beginning, i.e. from the first template point.
Lithography Results
Take a scan of the sample to acquire an image of the surface region exposed to
lithography.
Fig. 8-36 shows results of raster lithography. A CD fragment was used as the sample.
Lithography parameters were Action 1 = 4 nA, Action 2 = 0.8 nA; the probe was of NSG30
model.
Fig. 8-36. Image of the sample exposed to lithography