NT-MDT Solver Next - Vector Lithography; Preliminary Scanning and Selecting Lithography Region; Raster Lithography

Chapter 8. Lithography
189
When carrying out electrical lithography, there are two major options of sample surface
modification:
● changing sample topography;
● modifying physical properties of the sample surface without alternating the
topography.
Electrical lithography can be performed in the vector or in the raster mode.
This Chapter deals with:
1. Perfoming vector electrical lithography (see i. 8.3.1 on p. 189);
2. Perfoming raster electrical lithography (see i. 8.3.2 on p. 200).
8.3.1. Vector Lithography
ATTENTION! Before performing raster lithography, learn
i. 8.1 «Overview » on p. 163.
Basic operations of electrical vector lithography are:
1. Preliminary Scanning and Selecting Lithography Region (see i. 8.3.1.1 on p. 189);
2. Selecting the lithography method (see i. 8.3.1.2 on p. 191);
3. Creating Lithography Template (see i. 8.3.1.3 on p. 193);
4. Adjusting Lithography Parameters (see i. 8.3.1.4 on p. 194).
These operations are explained in details below.
8.3.1.1. Preliminary Scanning and Selecting Lithography
Region
Before performing the electrical lithography, take a testing scan in a semicontact mode
over the maximum scanning area.
NOTE. The preliminary scan can be taken with a contact technique as well, but this can
result in noticeable degradation of the conductive layer of the probe tip. This will lower
exposure level to the sample and expand the area under the tip undergoing exposure.
In the acquired scan, select a region for lithography. Take a scan of the selected region by
Kelvin Probe Microscopy (see i. 7.3.2 on p. 110).