Solver NEXT SPM. Instruction Manual
112
During the second pass the distance between the scanned surface and the probe is kept
constant. This distance should be big enough to eliminate the surface topography influence.
In this case, the probe is only affected by long-range forces whose most prominent yield is
due to electric properties of the sample. On the other hand the value of dZ should not be
too great as that would reduce the measured signal and impair the lateral resolution.
7.3.2.2. Procedural Sequence
The Kelvin Probe Microscopy uses substrates with the spring for mounting a sample
(see item 6.2 “Mounting the Sample” on p. 30) and conductive probes for semicontact
modes.
Preparing the instrument for operation and measuring in the SKM Mode are generally
similar to those of the SemiContact Mode, which are described in detail i. 7.2.1
“Semicontact Mode” on p. 84. A sequence of basic procedures, along with a detailed
description of instrument adjustment and specifics of SKM measurements, is provided
below.
Initial state
The following steps are assumed to be done:
● Launching the control program;
● Turning the instrument on;
● Installing the conductive probe;
● Adjusting the cantilever deflection detection system;
● Mounting the sample;
● Moving the measuring head to its working position;
● Approaching the sample to the probe at the distance of 0.5÷1 mm.
Measurement in the SKM Mode is arranged in the following procedural sequence:
1. Preparing for Operation (see Chapter 6 on p. 29).
2. Taking a Preliminary Scan in the Semicontact Mode (see i. 7.2.1 on p. 84).
3. Adjusting the Scanning Parameters for SKM (see i. 7.3.2.3 on p. 113).
4. Testing SKM operation mode (see i. 7.3.2.4. on p. 113).
5. Scanning (see i. 7.3.1.4 on p. 109).
6. Saving Measurement Data (see i. 7.2.1.7 on page 100)
7. Completing Measurements (see i. 7.2.1.8 on page 101)
For details on these operations see Ch. 6 “Preparing for Measurements” on p. 29.
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