Chapter 3. Operating Conditions
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3. Operating Conditions
The SPM should be installed in a room of total area larger 6 sq. meters with range of purity
better 8 (by ISO 14644-1-2002).
To provide for the qualitative and safe operation of the instrument, it is recommended to
observe the following conditions:
● environment temperature:
● ultimate range (15–35) °С;
● recommended range (20–25) °С.
● temperature drift: less 1˚C per hour;
● relative humidity:
● ultimate range (20–80) % (moisture condensation prevented);
● recommended range (30–50) % (moisture condensation prevented).
● vibration amplitude
in the band 1 ÷ 1000 Hz less 0.5 µm;
● atmospheric pressure (760±25) mm Hg/(100±4) kPa;
● the work area should be supplied with a protective grounding circuitry and with
grounded electric mains (110/220 V);
● electric mains:
● voltage (110±10)/(220±22) V;
● frequency (50.0±0.4)/(60±0.5) Hz;
● the room should be protected from mechanical vibrations and acoustic noises, either
internal or external;
● vibration criterion VC-C, 12.5 µm/s (one-third octave band criterion);
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