Chapter 8. Lithography
173
Fig. 8-9. Selected region for lithography
8.2.2. Vector Lithography
ATTENTION! Before performing vector lithography, lern i. 8.1
«Overview» on p. 163.
Initial state:
The following preparatory operations are assumed to be done:
● pressure of the probe onto the sample surface is estimated;
● the surface region for lithography is selected and scanned.
For details on these operations, refer to i. 8.2.1 «Preparation for Operation» on p. 169.
Basic operation
Basic operations of force vector lithography are:
1. Selecting Lithography Mode (see i. 8.2.2.1 on p. 174);
2. Creating the Lithography Template (see i. 8.2.2.2 on p. 176);
3. Adjusting Vector Lithography Parameters (см. 8.2.2.3 on p. 178);
4. Performing Lithography (see i. 8.2.2.4 on p. 181).
These operations are explained in details below.
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