NT-MDT Solver Next - Page 74

Solver NE
X
66
7.1.1.6.
Hereafter,
(standard
g
Startin
g
m
Scanning
o
(the samp
l
parameter
s
To start s
c
(see Fig. 7
This resul
t
● Line-
by
scan a
r
this is
a
X
T SPM. Inst
r
Scan
n
the scanni
n
g
rating TG
Q
m
easureme
n
o
f the sam
p
l
e has appr
o
s
have been
c
anning, cl
-15).
t
s in the fol
l
y
-line scan
n
r
ea appears
a
n image o
f
r
uction Man
u
n
ing
n
g process
w
Q
-1, 3 μm r
e
n
ts
p
le surface
o
ached to t
h
set).
ick the Ru
Fig. 7-15.
C
l
owing acti
v
n
ing of the
in the 2D
f
the rectan
g
Fig.
u
al
w
ill be expl
a
e
solution).
should be
h
e probe, t
h
n button i
n
C
ontrol pan
e
v
ity of the
s
sample su
r
Viewe
r
of
g
ular gratin
g
7-16. Surfa
c
a
ined with
t
preceded b
h
e operatio
n
n
the Cont
r
e
l of the Sca
s
yste
m
:
r
face starts
the scan d
a
g
;
c
e topograph
t
he exampl
e
y necessar
y
n
point is a
d
r
ol panel o
nning wind
o
and the co
r
a
ta (see Fi
g
y image
e
of a recta
n
y
preparati
o
d
juste
d
, an
d
f the Sca
n
o
w
r
respondin
g
g
. 7-16). In
n
gular grati
o
n procedu
r
d
all scanni
n
ning wind
o
g
image of
t
our exam
p
ng
r
es
ng
o
w
t
he
p
le,