Chapter 5: Assembly and Disassembly of Parts
SPD-M20A Service Manual
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4) Remove the three screws (sems, P3 M3x6) fixing the cover (cover ASSY P/N 228-
42587-91) of the removed optical system unit, and remove the cover.
Positions of Optical System Unit Cover Fixing Screws
5) The inside of the cover is shown below.
Interior of optical system unit
6) Remove the two screws (sems, P3 M3x6) fixing the side cover (side plate P/N 228-
33193) of the optical system unit, and remove the cover.
Positions of Side Cover Fixing Screws
7) The inside of the cover is shown below.
Optical system unit interior
PDA ASSY
P/N 228-42520-91
Slit ASSY, SH2
P/N 228-42519-91
Grating
GR ASSY, M20A
P/N 228-33187-92
Shutter ASSY
P/N 228-33140-91
Half mirror
LM ASSY
P/N 228-33183-91