Chapter 6: Maintenance and Adjustments
SPD-M20A Service Manual
45
6.3.6 Mirror 2 Adjustment (Rotation Direction, Elevation Angle Direction)
1) Remove the mask GR.
2) Attach the target GR (P/N 228-34184) on the grating.
3) Adjust the rotation direction and elevation angle of mirror 2 so that the optical image is
on the center of the target GR mark.
4) Confirm that the light optical on the grating meets the following conditions.
Should perfectly abut the center of Mirror 2
Should be no shadow in the image.
Should be no distortion of image shape
5) Remove the target GR.
6.3.7 Slit Adjustment (Rough Adjustment)
At this stage, roughly adjust the position of the slit ASSY close to the final position. Finely adjust the
slit ASSY while checking the image displayed on the screen of PDA Utility after the adjustment of the
position of the PDA element is completed.
NOTE
For the slit ASSY, use one that has been subjected to a durability test (1000 times
back and forth).
1) Press the slit ASSY in the Y direction shown in the figure below and move it in the X - X'
direction so that the light spot on the slit aligns with the slit.
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