Adixen ASM 310 - Technical Characteristics

GB 03312 - Edition 03 - February 12
1/2
A 500
Technical characteristics
Measurement range(*)
(Helium)
Crossover pressure
(at inlet)
mbar l/s Pa m
3
/s mbar Pa
Gross Leak test mode 8 · 10
-7
to 1 · 10
-1
8 · 10
-8
to
1 · 10
-2
15 1500
Normal test mode
1 · 10
-10
to
3 · 10
-4
1 · 10
-11
to
3 · 10
-5
5 · 10
-1
50
High Sensitivity test mode
1 · 10
-11
to
2 · 10
-4
1 · 10
-12
to
2 · 10
-5
4 · 10
-2
4
5 · 10
-12
with zero function
5 · 10
-13
with zero function
Sniffing test mode
1 · 10
-7
to 1 · 10
-1
1 · 10
-8
to 1 · 10
-2
sniffer probe at atm. pressure
Response time (Inlet port blanked off) < 1 s
* Zero function not activated, in standard conditions (20 °C, 5 ppm He ambient, degassed detector).
Gross leak test mode:
without zero function 8 · 10
-7
mbar.l/s
with zero function 8
· 10
-9
mbar.l/s
Technical data according to AVS 2.3 or EN 1518 or ISO 3530 standard
Helium pumping speed: Normal or High Sensitivity test mode
At inlet port 1.1 l/s
Roughing primary pump characteristics:
Hybrid pump pumping speed (in air) 1.7 m
3
/h
Turbomolecular pump characteristics:
Turbomolecular pump pumping speed (in air)
30 l/s
Turbomolecular pump exhaust pressure safety limit 45 mbar
Helium pumping speed 20 l/s
Analyzer cell (Spectro):
Analyzer cell design self protected 180° magnetic deviation mass spectrometer
Analyzer cell filaments
2 Iridium filaments
Emission current range 0.2 to 2 mA
Display:
Inlet port pressure display range 10
3
to 10
-3
mbar / 10
5
to 10
-1
Pa
adixen Vacuum Products - ASM 310 Operating instructions