Adixen ASM GRAPH - ASM 142 Detector Operating Principle; Vacuum Circuit

A 200
ASM 142 detector operating principle
GB 00208
-
Edition 03
- June
08
Vacuum circuit
1
2
V T3
3
VA1 7
18
V
C
V T2
5
8
V S
4
V
R1 VR2
VT1
Bacosol valve
Minisol valves
15
Reference correspondence between v a l v e / v a c uum block marks E 530
1 Preamplifier
2 Analyzer cell
3
Detector inlet port
4 Internal calibrated leak
5 Inlet
pressure gauge
7 Vent connector
8
Long distance sniffer connector
15
Roughing primary pump (RVP 20 0)
18
Detection molecular pump (AMP 007I)
V
A1 Inlet vent valve (6 points)
V
R1 Roughing valve ( point)
V
R2 Roughing valve (2 points)
V
T1 Exhaust valve (3 points)
V
T2 Detection valve (4 points)
V
T3 Detection valve (5 points)
V S Sniffing valve (9 points)
V C Calibration valve (7 points)
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