Adixen ASM GRAPH - ASM 142 D Detector Operating Principle

A 201
ASM 142 D detector operating principle
GB 01476
-
Edition 03
- June
08
Vacuum circuit
1
2
V T3
3
VA1 7
18
V
C V T2
8
V S
4
VT1
V
R1
5
VR2
10 12
16
15
Bacosol valve
Minisol valves
Reference correspondence between v a l v e / v a c uum block marks E 530
1
Preamplifier
V A1
Inlet vent valve (6 points)
2
Analyzer cell
V
R1
Roughing valve (1 point)
3
Detector inlet port
V
R2
Roughing valve (2 points)
4
Internal calibrated leak
V
T1
Exhaust valve (3 points)
5
Inlet
pressure gauge
V
T2
Detection valve (4 points)
7
Vent connector
V
T3
Detection valve (5 points)
8
Long distance sniffer connector
V
S
Sniffing valve (9 points)
10
Outlet pump connector
V
C
Calibration valve (7 points)
12
Purge filter
15
Roughing pump (AMD 1 )
16
Roughing molecular pump
(MDP 5006 HDS)
18
Detection molecular pump (AMP 007I)
1/4