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Adixen ASM GRAPH - Page 16

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A
201
ASM 142 D detector operating principle
GB 01476
-
Edition 03
- June
08
Stand-by mode
1
2
18
3
VA1
7
V
T1
16
15
Roughing
mode
3
(Patm
to 10 mbar inlet
pressure)
5
V
R1
VR2
16
15
2
/4

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