Adixen ASM GRAPH - ASM 142 Technical Characteristics

A 800
ASM 142
T echnical characteristics
GB 00212
-
Edition 03
- June
08
Measurement range
(Helium)
Crossover pressure
(at
inlet)
mbar.l/s Pa.m
3
/s mbar Pa
Gross leak test mode
1x10
-9
to 1 1 x 10
- 10
to 0.1
10 1000
Normal test mode
1 x 10
- 11
to 3x 10
- 4
1 x 10
- 12
to 3x 10
- 5
5x 10
- 1
50
Sniffing test mode
1x10
-7
to 1 x 10
- 1
1x10
-8
to 1
sniffer probe at atm. pressure
Response time (Inlet port blanked off)
< 0.5 s
Helium pumping speed at inlet port:
Gross leak test mode (at minimum inlet pressure)
1.1 l/s
Normal test mode (at minimum inlet pressure)
1.3 l/s
Roughing pump characteristics:
Roughing pump pumping speed (in air) 10 m
3
/h
Analyzer cell (Spectro):
Analyzer cell design
self protected 180° magnetic deflection mass spectrometer
Analyzer cell filament 2 separate tungsten filaments
Analyzer cell sensitivity
3x10
-4
A/mbar
Emission current range
0.2 to 2 mA
Displays adjustments:
Inlet port pressure display range
10
3
to 10
-3
mbar
10
5
to 10
- 1
Pa
1/2