M (E3.1) 1/2023 page 104/136
18.7 Inert gas connection with mostly gas-tight version (option)
With this option the chamber is additionally sealed, so the loss when introducing inert gases is decreased.
For details on the mostly gas-tight version please refer to chap. 18.6.
The chamber is equipped with two ports for inert gas (nitrogen or noble gases).
The ports are located on the top panel in the middle (A) and on the chamber rear at the bottom left
(seen from the back) (B). Each of these ports can be used as inlet or outlet, depending on the nature of the
inert gas:
• lighter gas (nitrogen, helium): lower port as inlet
• heavy gas (e.g. argon): upper port as inlet
This distinction is important when operating with a reduced fan speed.
Figure 15: Position of the inert gas ports on the top panel (A) and on the chamber rear (B)
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