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Bruker QUANTAX EDS User Manual

Bruker QUANTAX EDS
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QUANTAX EDS
Energy-dispersive X-ray spectrometer
for electron microscopy
User Manual

Table of Contents

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Bruker QUANTAX EDS Specifications

General IconGeneral
Detector TypeSilicon Drift Detector (SDD)
Analysis TypeEnergy Dispersive X-ray Spectroscopy (EDS)
Energy Range0-40 keV
Output Count RateUp to 500, 000 cps
ApplicationElemental Analysis
Energy Resolution123 eV at Mn Kα
Active Area10 mm² to 100 mm²
Cooling SystemPeltier cooling
SoftwareESPRIT
CompatibilitySEM, TEM
Input Count RateUp to 2, 000, 000 cps

Summary

Introduction

Safety Information

Details safety precautions and guidelines for operating the QUANTAX EDS system.

The QUANTAX EDS System

Provides an overview of the hardware components and software of the QUANTAX EDS system.

The ESPRIT 2 Software

Details the features and functionalities of the ESPRIT 2 software.

Safety Information

Radiation Safety

Details safety precautions regarding radiation hazards and system integrity.

Beryllium

Discusses toxicity and handling precautions for beryllium components.

Electrical Safety

Outlines safety requirements for electrical equipment and high voltage.

The QUANTAX EDS System

Hardware System Components

Describes the various hardware parts that constitute the QUANTAX EDS system.

General Operating Instructions

Provides essential guidelines for operating and maintaining the system components.

General Operating Instructions

The ESPRIT 2 Software

Configurator Bar

Step-by-Step Guides

Preparatory Steps

Guides on preparing the sample and system before starting analysis.

Energy-Channel Calibration

Details the process for calibrating energy channels for accurate analysis.

System Factor Calibration/ Beam Current Setting

Guides on determining system factors and measuring beam current.

Quantitative EDS Analysis of Bulk Samples

Covers quantitative EDS analysis methods for bulk samples.

Quantitative EDS of Electron Transparent Samples

Guides on quantitative EDS analysis for electron transparent samples.

Standards Library

Quantitative EDS Analysis of Bulk Samples

Using the Method Editor

Explains setting up quantification methods for automatic analysis.

Standardless Quantification

Describes steps for automatic standardless quantification and using the quantification dialog.

Standard-based Quantification with a Temporary Reference

Guides on standard-based quantification using temporary reference samples.

Standard-based Quantification with Standards Library

Details standard-based quantification using a standards library for measurements.

Quantitative EDS of Electron Transparent Samples

Standardless Cliff-Lorimer Quantification

Guides on standardless quantification of electron transparent samples.

Standard-based Cliff-Lorimer Quantification

Describes Cliff-Lorimer quantification of electron-transparent samples using standards.

Standard-based Zeta Quantification

Guides on standard-based quantification of electron transparent samples using beam current and thickness.

Quantitative Line Scan (QLi ne)

Map Acquisition

Quantitative Mapping (QMap)

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