Bruker QUANTAX EDS - Energy-Channel Calibration

5.2 Energy-Channel Calibration QUANTAX EDS
53
5.2
Energy-Channel Calibration
Correct energy-channel calibration is a prerequisite for reliable qualitative and quantitative analysis
results. Calibration should be checked on a regular basis or after re-start of the signal processing
unit (SVE).
Step
Examples/hints
1
Select
the workspace and
the
Spectrometer tab.
Do not confuse energy-channel calibration
with system factor calibration (
relevant for
standard
-based quantification; for details see
section 5.12.3 and 5.12.4).
2
Set a calibration sample into the analysis
position
.
Use a sample with any element in the mid
energy range (Mn
– Zn) without peak overlap
and sufficient
concentration. Preferably use
single element standards (e.g. pure copper) to
avoid peak misidentification, improve speed
and accuracy.
3
Set the beam current to produce an
intermediate count rate
.
Use microscope controls. Set appropriate
magnification on a homogeneous sample
area.
4
Select element and spectral line for
calibration.
Use K α lines whenever possible.
5
Click
to check the current
energy channel calibration
and deviation.
The test corresponds to the current
Pulse
throughput
and Maximum energy
displayed
in the
EDS configurator. The acceptable
deviation value is between +
5 eV and - 5 eV.
If not, proceed with step 6.
6
Select Pulse throughput and Energy
range under Settings to calibrate.
7
Choose accuracy and click .
Recommended value is
Medium.
8
Click
to save new calibration
data
.
The calibration data is not user specific.
Changes in calibration will affect all users of
the ESPRIT software.