5.1 Preparatory Steps QUANTAX EDS
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This chapter gives the analyst an
overview of the most important tools of the ESPRIT
software, permitting a quick start to perform analyses with the QUANTAX EDS system.
The procedures described here assume standard (default) ESPRIT settings. They also
refer to the use of a scanning electron microscope (SEM) or
electron microscope (STEM) or similar.
Differences in the analysis of bulk samples
(mainly SEM and FIB) and electron transparent samples (TEM, STEM, sometimes SEM or
This section describes the actions needed prior to starting the analytical work with the QUANTAX
EDS system.
Prepare the sample and place it in the
microscope
e.g., embedding, polishing and carbon
coating
Adjust high voltage and working distance
(
SEM) or eucentric height (TEM) on the
. Switch on the beam. Adjust
Choose high voltage (HV) based on
overvoltage of elements to analyze.
WD, Magnification, HV values must match
values set on
the microscope (see section
). Device status indicator should be
the EDS CONFIGURATION dialog and
a) Set Pulse throughput and Maximum
energy
Normal operation mode should be selected.
For
Pulse throughput and Maximum
settings. Change it on
demand.
b) Check Detector temperature.
Check operation temperature. Device status
indicator should be green (see section 4.5.5).
Check input count rate and dead time for
the analysis.
The input count rate should be chosen
according to the analytical task.
pen the SAMPLE PROPERTIES dialog
and set sample name and description.
The sample name applies for all further
measurements.
Proceed with required analysis.
Refer to section 5.7, 5.14, 5.15 or 5.17.