Contents QUANTAX EDS
3
Contents
1
Introduction .................................................................................................................................. 5
2 Safety Information ....................................................................................................................... 7
2.1 Radiation Safety ........................................................................................................... 9
2.2 Beryllium .................................................................................................................... 10
2.3 Electrical Safety .......................................................................................................... 10
2.4 Electromagnetic Compatibility ................................................................................... 11
3 The QUANTAX EDS System ..................................................................................................... 13
3.1 Hardware System Components ................................................................................. 15
3.1.1 XFlash
®
Energy Dispersive X-ray Detectors ................................................. 15
3.1.2 Signal Processing Unit ................................................................................... 15
3.1.3 Spectrometry Data Interface and EM Control ............................................... 16
3.1.4 Computer Workstations ................................................................................ 17
3.2 ESPRIT 2 Software ..................................................................................................... 18
3.3 General Operating Instructions .................................................................................. 19
3.3.1 Detector Maintenance ................................................................................... 19
3.3.2 Electronic Units ............................................................................................. 20
3.3.3 Software and Data Handling .......................................................................... 21
4 The ESPRIT 2 Software .............................................................................................................. 23
4.1 Start-up and Login ...................................................................................................... 25
4.2 User Administration ................................................................................................... 26
4.3 Workspaces................................................................................................................ 28
4.4 Display Control ........................................................................................................... 29
4.5 Configurator Bar ......................................................................................................... 31
4.5.1 Sample Configuration .................................................................................... 32
4.5.2 Standards Configuration ................................................................................ 32
4.5.3 Microscope Configuration ............................................................................. 33
4.5.4 Scan Configuration ........................................................................................ 34
4.5.5 EDS Configuration ......................................................................................... 36
4.5.6 Additional Configurators ................................................................................ 37
4.5.7 Report ............................................................................................................ 38
4.5.8 Project ........................................................................................................... 38
4.6 Loading and Saving Data and Results ........................................................................ 39
4.7 System Functions ...................................................................................................... 41
4.7.1 System .......................................................................................................... 41
4.7.2 Appearance.................................................................................................... 43
4.7.3 Spectrometer ................................................................................................ 44
4.7.4 Imaging .......................................................................................................... 45
4.7.5 WDS .............................................................................................................. 47
4.7.6 Microscope .................................................................................................... 47
4.7.7 Stage ............................................................................................................. 47
4.8 The Help System ........................................................................................................ 47
5 Step-by-Step Guides .................................................................................................................. 49
5.1 Preparatory Steps ....................................................................................................... 51
5.2 Energy-Channel Calibration ........................................................................................ 53