Bruker QUANTAX EDS User Manual

User Manual 5 Step-by-Step Guides
94
5.13.3
Standard-based Zeta Quantification
This section describes how to perform standard-based quantification of electron transparent
samples using beam current and thickness of standard sample as reference values.
Step
Example/hints
1
Click the Standards configurator’s
calibration icon
to open the
S
YSTEM FACTOR CALIBRATION
dialog.
2
Measure and enter the beam current
value as system factor.
Follow section 5.10 for electron transparent
samples. Ente
r the beam current in [pA] units
.
3
Check or Load the appropriate Zeta
factors.
Follow section 5.11.3.
4
Select
the or
workspace and
a) a spectrum
b)
use the Spectrum chart icon to
open a spectrum
Enter the beam current as spectrum
parameter:
double click on the
highlighted line
of the active spectrum in the spectrum list
(
below the spectrum) to open the
SPECTRUM PROPERTIES
dialog and enter
the beam current in pA as system factor in
the Parameter tab.
c) drag and drop a spectrum from project
to Spectrum chart
.
5
Click
on the
button and
Load…
a quantification method.
Select a TEM quantification method.
Alternatively drag and drop a quantification
method from the project to spectrum.
6
Set the quantification method to
interactive ( ).
7
Click on
the button to
access the QUANTIFICATION dialog.
8
Set Quantification model to Zeta factor
method
and perform quantification of
“unknown” sample
.
See section 5.12.1 to optimize quantification
and to save or export quantification method
and results.
Calculated thickness is shown below the
result table. Density is calculated based on
element composition. If density is known, it
can be entered and sample thickness wi
ll
change correspondingly.
9
Click
to close the
QUANTIFICATION dialog.

Bruker QUANTAX EDS Specifications

General

Brand	Bruker
Model	QUANTAX EDS
Category	Laboratory Equipment
Language	English