1 Introduction
QUANTAX is the ideal all-purpose energy dispersive microanalysis system for industry,
research and education. Different system levels and various options are provided for
scaling and tuning of QUANTAX to a broad range of analysis tasks and application
environments. QUANTAX microanalysis systems are suitable for scanning electron
microscopes, transmission electron microscopes, electron beam microprobes, dual beam
devices, as well as other X-ray spectrometry applications.
All QUANTAX systems provide state-of-the-art qualitative and true standardless
quantitative microanalysis for bulk specimens, polished samples, thin layers, particles,
and rough surfaces. This is accomplished by optimized automatic or interactive spectrum
analysis methods, fundamental parameter approaches (e.g. P/B-ZAF) and the most exact
and comprehensive atomic database available. Different standard-based quantification
packages are optionally available. The unique capability of combining standard-based and
standardless analysis methods (hybrid quantification) completes the range of analytical
possibilities.
An intuitive user interface, the flexible project management package, as well as various
options for quick and comprehensive report generation complement the analysis
toolboxes. The software tools are tailored to meet both the needs of the novice as well as
the experienced user. All QUANTAX systems’ ESPRIT software includes an online help
system and supports remote diagnosis and assistance via the Internet.
This manual provides a general software overview and a practical step-by-step description
of the most common measurement procedures that can be performed with the
QUANTAX EDS system. The integrated assistants and the online help of the ESPRIT
software provide additional support. Details on the individual hardware parts and
additional technical data are contained in separate manuals. The individual device manuals
also contain further references regarding operational safety. Please follow all safety
instructions closely to avoid hazards to personal safety and equipment. In case of
necessary maintenance, reinstallation, severe computer breakdown, hardware changes,
etc. the Bruker customer support or your local supplier have to be contacted for further
assistance and instructions.
According to the modular structure of QUANTAX not all parts of this manual may apply in
detail to a given installation nor should be taken literally in all cases. For instance, where
the general term “electron microscope” (EM) is used, this applies to the whole class of
electron-beam or dual-beam systems; SEM includes also STEM, microprobes, or other
scanning devices.
The ESPRIT software layout may vary according to the modules installed on your system
and therefore may differ slightly from what is shown in the illustrations and figures.