User Manual Contents
4
5.3 Image Capture ............................................................................................................ 55
5.4 Image Extension ......................................................................................................... 57
5.5 Drift Correction ........................................................................................................... 59
5.6 Image Processing ....................................................................................................... 61
5.7 Spectrum Acquisition ................................................................................................. 63
5.8 Using the Spectrum Chart .......................................................................................... 65
5.9 Sample Coating Correction ......................................................................................... 68
5.10 System Factor Calibration/ Beam Current Setting ...................................................... 70
5.11 Standards Library ........................................................................................................ 73
5.11.1 Maintain Standards Library for Bulk Samples ................................................ 73
5.11.2 Maintain Standards Library for Electron Transparent Samples –
Cliff-Lorimer Factors ...................................................................................... 76
5.11.3 Maintain Standards Library for Electron Transparent Samples –
Zeta Factors ................................................................................................... 78
5.12 Quantitative EDS Analysis of Bulk Samples ............................................................... 81
5.12.1 Using the Method Editor ............................................................................... 81
5.12.2 Standardless Quantification ........................................................................... 83
5.12.3 Standard-based Quantification with a Temporary Reference ........................ 86
5.12.4 Standard-based Quantification with Standards Library .................................. 88
5.13 Quantitative EDS of Electron Transparent Samples ................................................... 90
5.13.1 Standardless Cliff-Lorimer Quantification ...................................................... 90
5.13.2 Standard-based Cliff-Lorimer Quantification .................................................. 92
5.13.3 Standard-based Zeta Quantification ............................................................... 94
5.14 Object Analysis ........................................................................................................... 96
5.15 Line Scan .................................................................................................................... 98
5.16 Quantitative Line Scan (QLine) ................................................................................. 100
5.17 Map Acquisition ........................................................................................................ 102
5.18 Quantitative Mapping (QMap) .................................................................................. 104
5.19 Map Processing ........................................................................................................ 106
5.20 Phase Analysis .......................................................................................................... 109
5.21 Creating a Report ...................................................................................................... 112
5.22 Managing Projects .................................................................................................... 114
Index................................................................................................................................................ 117