Bruker QUANTAX EDS - Standard-based Quantification with a Temporary Reference

User Manual 5 Step-by-Step Guides
86
5.12.3
Standard-based Quantification with a Temporary Reference
This guide describes how to perform standard-based quantification without calibration of system
factor, measuring reference and unknown samples with same microscope/beam conditions.
Step
Example/hints
1
Prepare an “unknown” sample,
reference sample(s) and a sample for
system factor calibration
.
Select workspace.
“Unknown” sample, reference sample(s) and
sample for system factor calibration must be
available at the same time
in the SEM
chamber.
2
Calibrate the system factor.
For details see section 5.10. Do not change
microscope parameters afterwards.
3
Select
the or
workspace.
4
Move the reference sample into
analytical position and
a
spectrum.
Follow 5.7 to acquire a spectrum. Use
automatic spectrum numbering or
rename
spectrum after acquisition.
5
Click
at the button and
select Load…
Load a quantification method.
6
Set Method mode to Interactive ( ).
7
Click
.
The QUANTIFICATION dialog opens.
Set quantification parameters (Element ID,
EDS background, Deconvolution) as needed.
8
Click .
EDIT STANDARD PROPERTIES dialog opens
9
Enter reference concentrations and click
.
NOTE: The reference values are
TEMPORARILY stored
until the ESPRIT
software is closed.
They will not be added
into the sta
ndards library. For advanced
standard
-based quantification options see
section 5.12.4.
10
The VALIDATION dialog pops up. Close
it with .
11
Click
to close the
QUANTIFICATION dialog.
12
Repeat steps 4-11 for other reference
samples.
13
Move the “unknown” sample into the
analytical position
.
Do not change any relevant microscope
settings (beam current, focus, high voltage...)
14
a spectrum.
If automatic quantification during or after
acquisition is enabled
(see 5.7), the spectrum
is quantified automatically and the result
s
appear in the result list.