4.7 System Functions QUANTAX EDS
45
The tab gives access to image
electron microscope (EM) stage calibration.
Image input.
The image input links the
etween ESPRIT software and the
EM. The settings here are microscope
dependent
and should only be modified by Bruker service
personnel.
Image calibration.
The image calibration is
performed to calibrate the pixel values within the
ESPRIT software. It is pos
sible to calibrate based on
scale bars, but user should
ensure that the pixel values on the microscope is up
to date before performing image and stage
calibration in the ESPRIT software.
A standard calibration grid or any specimen
that has
features of known geometry can be used for image
calibration. After capturing an EM image, locate the
features of the image by the green overlay line. T
adjust the line, click on the line once
sizing handles, then drag the handles to
position of the end points of the line.
Fig. 4.7-6 Stage calibration setup
Once confirmed, enter the correct/certified values of
the line length in µm. Click the
store the according calibration value.
Stage calibration.
This option calibrates the stage
movement alongside the SEM image for montage
purposes. Before stage calibration, user must ensure
that the line length (pixel calibration) is pr
calibrated.
To start calibration, capture a SEM image, then
the acquisition settings by clicking on the
icon in
the Acquire button. The settings that can be changed
here include the percentage of overlap (it is advised
value for actual montage
acquisition in other modes), 2 x 2 or 3 x 3 images.
Click on the icon again to confirm the settings.
it is recommended to switch off the
scan rotation on the SEM to
movement matches the scan direction. Click
acquisition. A
progress bar will show the progress of the image