5.5 Drift Correction QUANTAX EDS
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The drift correction tool compensates sample drift when performing long and/or high-resolution
acquisitions.
scan,
Mapping, or Imaging).
These workspaces allow capturing an EM
image and beam control
Set measurement conditions and before
start
ing the analysis proceed as follows:
Refer to the guides in section 5.3, 5.14, 5.15
or
5.17. When acquiring a Map, select a
smaller map area than the captured image.
Use
Fixed or Variable options under Map
area (see step 6 in 5.17).
corner of the Scan configurator to
the SCAN CONFIGURATION dialog.
MAGE
DRIFT CORRECTION SETTINGS dialog.
When performing a Line scan or Objects
analysis, select
Use Current input and 60 seconds as initial
value for
Correction interval. If the analysis
se Current value as Dwell time to
capture the same quality image as during the
analysis or use a lower
used for Imaging to save time.
When acquiring a Map, the correction
time is equal to the
If image drift is extensive, reduce Image
capture time
by decreasing Mapping Dwell
to change parking position
Use a parking position outside of the analysis
area to avoid beam induced contamination.
Right click
Click on to activate drift correction.
Start data acquisition by clicking the
The system starts acquisition and captures an
image after each correction interval set in
Step
click on to display current
The latest correction image, the latest
calculated drift vector (arrow) and the quality
of drift correction are displayed. When the
drift exceeds the limit which can be corrected
by the system, the acquisition st
automatically. Acquired data remains in
The starting image records the initial acquired
image when the acquisition starts. The image
is then compared at interval
The quality plot records the pixel shift in X
and Y direc
tions of the image obtained at the
latest interval as compared to the original
image.