5 Step-by-Step Guides
5.1
Preparatory Steps ....................................................................................................... 51
5.2 Energy-Channel Calibration ........................................................................................ 53
5.3 Image Capture ............................................................................................................ 55
5.4 Image Extension ........................................................................................................ 57
5.5 Drift Correction ........................................................................................................... 59
5.6 Image Processing ....................................................................................................... 61
5.7 Spectrum Acquisition ................................................................................................. 63
5.8 Using the Spectrum Chart .......................................................................................... 65
5.9 Sample Coating Correction ........................................................................................ 68
5.10 System Factor Calibration/ Beam Current Setting ..................................................... 70
5.11 Standards Library ....................................................................................................... 73
5.12 Quantitative EDS Analysis of Bulk Samples .............................................................. 81
5.13 Quantitative EDS of Electron Transparent Samples .................................................. 90
5.14 Object Analysis .......................................................................................................... 96
5.15 Line Scan .................................................................................................................... 98
5.16 Quantitative Line Scan (QLine) ................................................................................. 100
5.17 Map Acquisition ....................................................................................................... 102
5.18 Quantitative Mapping (QMap) .................................................................................. 104
5.19 Map Processing ....................................................................................................... 106
5.20 Phase Analysis ......................................................................................................... 109
5.21 Creating a Report ..................................................................................................... 112
5.22 Managing Projects ................................................................................................... 114