Edwards STP-iX457 Series - Page 123

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 113
5
SERIAL COMMUNICATION PROTOCOL
Parameter Item Data format Remarks
1
Input operation port setting
8-bits hexadecimal
coded ASCII
2
*1
TMS Option
Enable/Disable setting
8-bits hexadecimal
coded ASCII
3
[System reservation]
8-bits hexadecimal
coded ASCII
4
Vent valve
Enable/Disable setting
8-bits hexadecimal
coded ASCII
5
Vent valve starting speed setting
8-bits hexadecimal
coded ASCII
1 % step
6
Vent valve running time setting
16-bits hexadecimal
coded ASCII
5 sec. step
7
Air-cooling fan
Enable/Disable setting
8-bits hexadecimal
coded ASCII
8
Second Damage Limit Option
Enable/Disable setting
8-bits hexadecimal
coded ASCII
9
First Damage Limit Warning
Enable/Disable setting
8-bits hexadecimal
coded ASCII
10
Pump Runtime Over Warning
Enable/Disable setting
8-bits hexadecimal
coded ASCII
11
Pump Runtime Over Warning
Hours setting (×100 hours)
32-bits hexadecimal
coded ASCII
12
Imbalance Warning
Enable/Disable setting
8-bits hexadecimal
coded ASCII
13
Pump Overload Warning
Enable/Disable setting
8-bits hexadecimal
coded ASCII
14
Pump Overload Warning
Motor current setting
16-bits hexadecimal
coded ASCII
0.1 % step
15
Pump Overload Warning
Rotational speed setting
16-bits hexadecimal
coded ASCII
0.1 % step
16
Serial communication time out setting
(Unit: sec.)
16-bits hexadecimal
coded ASCII
60 sec. step
17
PROG OUT pin setting
8-bits hexadecimal
coded ASCII
18
PROG IN pin setting
8-bits hexadecimal
coded ASCII
19
[System reservation]
72-bits hexadecimal
coded ASCII
*1 Valid only with TMS specification