3-64 Keysight B1505A User’s Guide, Edition 12
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Following tables are for the OFF state static characteristics measurements. The
N1267A keeps switch OFF status. HCSMU applies 0 V. HVSMU performs I-V
measurement and measures Vds or Vr. Id(Off) or Ir is given by the total current
measured by HCSMU and HVSMU.
Table 3-15 Source Setting Range for Id(Off)-Vds, Ir-Vr Measurement
Table 3-16 HVSMU Voltage Measurement Range for Id(Off)-Vds, Ir-Vr Measurement
Table 3-17 Current Measurement Range for Id(Off)-Vds, Ir-Vr Measurement
Leak error for the Id(Off)-Vds, Ir-Vr measurement is typical 2 nA.
HVSMU source setting
HCSMU source
setting
Range Setting value Resolution Compliance
200 V 0 V to 200 V 200 V10 A to 8 mA 0 V output with
compliance more
than HVSMU
compliance
500 V 0 V to 500 V 500 V
1500 V 0 V to 1500 V 1.5 mV
3000 V 0 V to 3000 V 3 mV 10 A to 4 mA
Range Measurement value Resolution
200 V 0 V to 200 V 200 V
500 V 0 V to 500 V 500 V
1500 V 0 V to 1500 V 1.5 mV
3000 V 0 V to 3000 V 3 mV
HVSMU HCSMU
Range Resolution Range Resolution
10 A 10 pA 10 A 10 pA
100 A 100 pA 100 A 100 pA
1 mA 1 nA 1 mA 1 nA
10 mA 10 nA 10 mA 10 nA
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