Table of Contents
7.5.3.1. Configuring and Making Measurements ............................................................................. 156
7.6. STM SPECTROSCOPIES ................................................................................................................. 159
7.6.1. Current Imaging Tunneling Spectroscopy I(V) ................................................................. 159
7.6.2. I(Z) Spectroscopy .............................................................................................................. 161
8. LITHOGRAPHY .................................................................................................................................. 163
8.1. OVERVIEW .................................................................................................................................... 163
8.1.1. Vector Lithography ........................................................................................................... 163
8.1.1.1. Simple vector lithography ................................................................................................... 164
8.1.1.2. Gradient lithography ............................................................................................................ 164
8.1.1.3. Pulse lithography ................................................................................................................. 165
8.1.1.4. Pulse-gradient lithography ................................................................................................... 166
8.1.2. Raster lithography ............................................................................................................. 167
8.2. FORCE LITHOGRAPHY ................................................................................................................... 168
8.2.1. Preparation for Operation ................................................................................................ 169
8.2.1.1. Estimation of the Probe Pressure on the Sample ................................................................. 169
8.2.1.2. Preliminary Scanning and Selecting Lithography Region ................................................... 172
8.2.2. Vector Lithography ........................................................................................................... 173
8.2.2.1. Selecting Lithography Mode ............................................................................................... 174
8.2.2.2. Creating the Lithography Template ..................................................................................... 176
8.2.2.3. Adjusting Vector Lithography Parameters .......................................................................... 178
8.2.2.4. Performing Lithography ...................................................................................................... 181
8.2.3. Raster Lithography ............................................................................................................ 183
8.2.3.1. Selecting the lithography method ........................................................................................ 183
8.2.3.2. Loading Template ................................................................................................................ 185
8.2.3.3. Adjusting Lithography Parameters ...................................................................................... 186
8.2.3.4. Performing Lithography ...................................................................................................... 187
8.3. ELECTRICAL LITHOGRAPHY .......................................................................................................... 188
8.3.1. Vector Lithography ........................................................................................................... 189
8.3.1.1. Preliminary Scanning and Selecting Lithography Region ................................................... 189
8.3.1.2. Selecting the lithography method ........................................................................................ 191
8.3.1.3. Creating Lithography Template ........................................................................................... 193
8.3.1.4. Adjusting Lithography Parameters ...................................................................................... 194
8.3.1.5. Performing Lithography ...................................................................................................... 198
8.3.2. Raster lithography ............................................................................................................. 200
8.3.2.1. Preliminary Scanning and Selecting Lithography Region ................................................... 201
8.3.2.2. Selecting the lithography method ........................................................................................ 202
8.3.2.3. Loading Template ................................................................................................................ 203
8.3.2.4. Adjusting Lithography Parameters ...................................................................................... 204
8.3.2.5. Performing Lithography ...................................................................................................... 205
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