NT-MDT Solver Next - Page 184

Solver NE
X
176
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Pu
l
pu
l
am
p
NOTE. F
o
Lithograp
h
8.2.2.2.
1. Create
Toolb
a
b
efore.
in the
f
2. In the
object
s
refer t
o
An examp
l
X
T SPM. Inst
r
l
se
g
radien
t
l
se and the
p
litudes va
r
o
r details
o
hy
”.
Creat
i
a new lit
h
a
r of the Li
t
This step
i
f
inal templ
a
Lithograp
h
s
(Fig. 8-17
)
o
the manu
a
l
e of the te
m
r
uction Man
u
t
– pulse-g
r
gradient o
n
r
ying in a p
r
o
n vector
l
Fig. 8-
1
i
ng the
L
h
ography t
e
t
hography
t
i
s required
t
a
te.
h
y template
)
with the t
o
a
l Nova P9.
Fig. 8-16
m
plate for
v
u
al
r
adient lith
o
n
es. The s
a
r
edefined r
a
l
ithography
1
5. Selectin
g
L
ithogra
p
e
mplate. T
t
emplate (
F
t
o prevent
a
viewing
a
o
ols of the
T
SPM Cont
r
. Toolbar of
t
v
ector litho
g
o
graphy. C
o
a
mple is ex
p
a
nge durin
g
modes, r
ef
g
the lithogr
a
p
hy Tem
p
o this pur
p
F
ig. 8-16).
T
a
ny object
o
a
rea, define
T
oolbar (F
i
r
ol Porgra
m
t
he Lithogra
p
g
raphy is s
h
o
mbines tw
o
p
osed to a
g
drawing o
b
ef
er to Ch
a
a
phy mode
p
late
p
ose, click
T
his will re
m
o
utside the
s
positions
a
i
g. 8-16). F
o
m
.
p
hy templat
e
h
own in Fig
.
o
lithograp
h
series of f
o
b
jects.
a
pter 8, i.
8
the
b
m
ove all o
b
s
elected re
g
a
nd sizes
o
o
r details o
n
e
.
8-17.
h
y modes,
t
o
rce pulses
8
.1.1 “Vec
t
b
utton in
t
b
jects crea
t
g
ion to app
e
o
f the desi
r
n
the Toolb
t
he
of
t
or
t
he
t
ed
e
ar
r
ed
ar,