Chapter 8. Lithography
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When the procedure completes, the Stop button returns to its initial appearance.
The lithography process can be stopped by clicking the Stop button or by pressing the
<Esc> key. This will stop the prcess immediately. Next clicking the Run button would start
the lithography procedure from the very beginning, i.e. from the first template point.
Lithography Results
Take a scan of the sample by Kelvin Probe Microscopy. Results of electrical lithography
can be assessed with the surface potential distribution. For details on scanning, refer to
SPM Solver Next. User's Manual.
Results of charge lithography
Fig. 8-56 shows results of the Simple vector lithography applied to the GaAs sample with
BV = 0 V, Action = 10 V by the NSG01/TiN probe.
Fig. 8-56. Sample surface after lithography
left – topography; right – surface potential distribution
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