Solver NEXT SPM. Instruction Manual
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Results of current lithography
Fig. 8-57 shows results of the Simple vector lithography applied to the
octadecyltrichliorsylanum with Action = 0.3 nA by the DCP 11 probe.
Fig. 8-57. Sample surface after lithography
8.3.2. Raster lithography
ATTENTION! Before performing raster lithography, learn i. 8.1
«Overview» on p. 163.
Basic operations of force raster lithography are:
1. Preliminary Scanning and Selecting Lithography Region (see i. 8.3.2.1 on p. 201);
2. Selecting the lithography method (see i. 8.3.2.2 on p. 202);
2. Loading Template (see i. 8.3.2.3 on p. 203);
3. Adjusting Lithography Parameters (see i. 8.3.2.4 on p. 204);
4. Performing Lithography (see i. 8.3.2.5 on p. 205).
These operations are explained in details below.
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