Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page vii
PAGE
vii
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-1601 front panel functions 16
3 SCU-1601 front panel functions (continued) 17
4 SCU-1601 rear panel connection 18
5 Power cable 28
6 User setting data list 35
7 Causes of "CAUTION" at the self test state 54
8 X7 REMOTE input signal pins 59
9 X7 REMOTE input signal pins (continued) 60
10 X7 REMOTE output signal pins 63
11 X7 REMOTE output signal pins (continued) 64
12 Rated contacts for relays CR1 to CR9 66
13 Starting/Stopping the STP pump during remote operation
(X7 REMOTE) 66
14 Rotation INHIBIT signal input 67
15 Second speed function 69
16 Reset operation during remote operation (X7 REMOTE) 70
17 X3A/X3B pin position 74
18 X7 pin position 75
19 Communication parameters 78
20 Transmission control characters 82
21 Pump operation commands 91
22 Command list 96
23 Pump operation commands 98
24 Error message values 100
25 Error message values (continued) 101
26 Pump operation mode 102
27 Remote mode 107
28 Warning value bit assign 111
29 Option function number and parameter list 115
30 Option function number and parameter list 118
31 Functions of STP-Link 127
32 Backup rotational speed 131
33 States of LCD, LEDs and REMOTE output signals
at a power failure 132
34 Accumulated damage point and warning message 136
35 Default setting of "WARNING" function 139
36 Factory setting and variable range 139
37 Error messages at self test state 140
38 Error messages after self test 143
39 Error messages after self test (continued) 144
40 Error messages after self test (continued) 145
41 Error messages after self test (continued) 146
42 Error messages after self test (continued) 147
43 Error messages after self test (continued) 148
44 Error messages after self test (continued) 150
45 Troubleshooting when powering ON 151
46 Troubleshooting when performing the STP pump
start operation 151
47 Troubleshooting while the STP pump is rotating 152