Edwards STP-iX457 Series

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STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

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viii

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Main Page

Table of Contents3
Introduction11
Scope and Definitions11
Applied Standards12
Limited Warranty13
Warranty Period13
Item Warranted13
Disclaimer14
Spare Parts14
Precautions for Safe Operation of the STP Pump15
Usable Gases15
Maintenance and Inspection Precautions16
Labels16
STP Pump Installation Warning Label16
Hot Surface Warning Label16
Heavy Product Caution Label17
High Voltage Device Caution Label17
Rotation Instruction Label17
Operation Principle of the STP Pump18
Cross Sectional View of the STP Pump18
STP Pump Specification20
Technical Data21
STP Pump Specifications21
Control Unit22
External Appearance of the STP Pump23
External Appearance of STP-Ix45723
External Appearance of STP-Ix457C24
External Appearance of STP-Ixu45725
External Appearance of STP-Ixu457C26
Label Affixing Positions27
Installation of the Stp Pump29
Precautions before Installation29
Operating Environment29
Environmental Requirements for Installation30
Installation Area31
Space Around the STP Pump31
Space Around the STP Pump (with Air-Cooling Unit [Optional Accessory])31
Bench32
Insulation Test32
Unpacking and Installation33
Example of Lifting the STP Pump33
Eyebolt Size33
Example of Lifting the STP Pump (Horizontal Positioning)34
Jack-Up the STP Pump35
Control Unit Bottom Face35
STP Pump with Eyebolts36
Name and Function of each Part37
Name and Function of the Pump37
Configuration of the STP Pump37
Pump Functions37
Name and Function of the Control Unit38
Control Unit38
Control Unit Front Panel Functions39
How to Install the STP Pump40
Installation of the STP Pump to the Vacuum Equipment40
Cleaning the Seal41
STP Pump Installation Positions42
Positions of the Outlet Port on the Horizontally42
Secure the STP Pump43
Tightening Torque of Bolt43
Example of Securing the STP Pump (When Securing the Inlet Port with Bolts)44
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange44
Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)45
Number of Claw Clamps for Flange Size45
Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)46
Legs for Securing the Base47
Recommended Leg for Securing Base47
Screw Holes for Securing the Base47
Rotation Stopper48
External Power Supply Unit49
DC Power Cable49
DC Power Cable51
Suitable Parts for DC Power Cable51
Number of Claw Clamps for Flange Size51
Vent Valve52
Connecting the Vent Valve52
Vent Valve Connection52
Example of a Control Method53
Vent Valve Output54
X3 OPTION Connector Function Setting54
Vent Valve Operation Setting54
Precautions of Vacuum Piping55
Vacuum Piping Method56
Height of Purge Port56
Attaching a Baking Heater57
Baking Heater Installation Position57
Cooling the STP Pump58
Air-Cooling Unit58
Air-Cooling Unit U1-8659
3.12.1 Parts List59
3.12.2 Installation Procedure59
3.12.3 Maintenance60
Connecting to Semiconductor Equipment61
3.13.1 Connecting to Power61
Emergency off Circuit (EMO Circuit)61
Operation63
Gas Pumping, Cooling and Baking the STP Pump63
Gas Pumping63
How to Introduce a Purge Gas64
Baking the STP Pump64
Before Starting the STP Pump65
Confirmation before Starting65
Confirmation of Vacuum System65
Powering on66
Pump Operation66
Input Operation Port Setting66
Starting/Stopping the STP Pump66
Pump Operation Method66
Starting/Stopping the STP Pump (X2 REMOTE)66
How to Start/Stop the STP Pump67
Starting the STP Pump after Stopping67
Starting the STP Pump after a Safety Function Operates67
Powering off67
Reset Operation (X2 REMOTE)67
Led68
Flash Pattern of STATUS68
Parallel Port Input/Output Signal69
Input Signal Pins69
X2 REMOTE Connector69
X2 REMOTE Input Signal Pins70
X2 REMOTE Input Signal Pins (Contact Input)71
Input Operation Port Setting72
X2 REMOTE Pin Function Matrix for Input Signal72
(Type-A PROG-IN)72
(Type-B PROG-IN)72
Second Speed Option73
Second Speed Function73
Output Signal Pins74
X2 REMOTE Output Signal Pins74
X2 REMOTE Output Signal Pins (Continued)75
X2 REMOTE Output Signal Pins76
Rated Contacts for Four Photo Relays76
X2 REMOTE Output Signal Pin Which Changes77
According to Abnormality Notification / Warning Notification77
X2 REMOTE Output Signal Pin Which Changes According to Rotation Speed77
Serial Communication Protocol79
Introduction79
Serial Port79
Connection and Setting up80
Signal Connection80
X2 Connector (High Density D-Sub15)80
X2 Pin Position80
Connecting the RS48582
RS485 Connections82
Communication Parameter Setting83
Input Operation Port Setting83
Communication Parameters83
Input Operation Port83
Serial Communication Timeout Setting84
Serial Communication Time out Setting84
Recommended Items about Communication Cable Installation85
Grounding Example (both Ends Grounding)85
Grounding Example (Single Point Grounding)85
Example of Ring Ferrite Core Installation86
Example of Cable Installation in Metallic Duct86
Example of Differential Signal Waveform87
Protocol Specifications88
General Description88
PC to SIM Communication88
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)89
Transmission Control Characters89
Control Command90
(In the RS232/RS485 Single Point Connection)90
Query Command91
(In the RS232/RS485 Single Point Connection)91
Transmission Data Format92
Frame Control (Checksum)93
Error Control93
Transmission Frame in the RS485 Multi-Point Connection93
Control Command in the RS485 Multi-Point Connection95
5.3.10 Query Command in the RS485 Multi-Point Connection96
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection97
Pump Operation Commands97
5.3.12 Application Note98
Block Diagram of Communication Process Example98
Example of Answer Resending Process99
Example of Response When the Command Is Sent Continuously99
Example of Command Sending During Answer Data Reply99
Example of Communication Cycle Process100
Example of Command Sending Process101
Command Specifications102
Command List102
Readmeas103
Command103
Readfailmess104
Pump Operation Commands104
Error Message Values106
Error Message Values (Continued)107
Readmodfonct108
Pump Operation Mode109
Readversion110
Readcounters111
Readsetpoint112
Readmotortemp112
5.4.10 Readstatus113
5.4.11 Readevents114
Remote Mode114
Setspeedsetpoint115
5.4.13 Readspeedsetpoint116
5.4.14 Readmodfonctwithwarning117
Warning Value Bit Assign118
5.4.15 Readmeasvalue120
5.4.16 Readoptionfunc122
Parameter Setting Value124
5.4.17 Setoptionfunc126
5.4.18 Readcondition129
5.4.19 Readeventswithtime131
5.4.20 Setoptions135
5.4.20.1 Second Speed Option Setting135
Option Function Number and Parameter List135
5.4.20.2 Second Speed Selection136
5.4.21 Readoptions137
5.4.21.1 Second Speed Function Setting137
Option Function Number and Parameter List137
5.4.21.2 Second Speed Select138
Stp-Link and Power Supply Unit139
STP-Link139
Functions of STP-Link139
Power Supply Unit140
Power Supply Unit Ipd-240-24V140
Safety Functions141
Power Failure141
Operation after a Power Recovery142
Abnormal State of Magnetic Bearing (Disturbance)143
Excessive Vibration (Disturbance)143
Motor Driver Overload (DRV Overload)143
Overheating Inside the STP Pump (MOTOR Overheat)143
Overheating Inside the Control Unit (CNT Overheat)143
Overspeed144
WARNING" Function144
Contents of WARNING Function145
First Damage Limit145
Second Damage Limit145
Pump Run Time over145
Pump Overload146
Imbalance146
Other Warning146
WARNING Function Setting147
Troubleshooting Immediately after Failure Occurs148
After Power Failure148
After Other Abnormality/Error148
Troubleshooting149
Indication of "STATUS" LED (Red Flash)149
Maintenance and Inspection153
Cleaning154
Indication of "STATUS" LED (Green and Red Alternately)155
No Indication of the "STATUS" LED (Red)155
Maintenance and Inspection157
Transporting for Repair or Overhaul157
Inspecting the Deposit158
Maintenance159
Recommended Overhaul Intervals159
Standard Replacement Parts159
Recommended Maintenance Intervals for Main Parts160
Storage and Disposal163
Storage of the STP Pump163
Disposal164
Service, Spares and Accessories165
Introduction165
Service165
Spares165
Accessories166

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