Edwards STP-iX457 Series - Page 9

STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page vii
PAGE
vii
TABLES
Table Title Page
1 Environmental requirements for installation 20
2 Eyebolt size 23
3 Pump functions 27
4 Control unit front panel functions 29
5 Tightening torque of bolt 33
6 Maximum torque predicted
and recommended securing bolt for inlet port flange 34
7 Number of claw clamps for flange size 35
8 Suitable parts for DC power cable 41
9 Number of claw clamps for flange size 41
10 X3 OPTION connector function setting 44
11 Vent valve operation setting 44
12 Starting/stopping the STP pump (X2 REMOTE) 56
13 Reset operation (X2 REMOTE) 57
14 X2 REMOTE input signal pins 60
15 Second speed function 63
16 X2 REMOTE output signal pins 64
17 X2 REMOTE output signal pins (continued) 65
18 Rated contacts for four photo relays 66
19 X2 pin position 70
20 Communication parameters 73
21 Input operation port 73
22 Serial communication time out setting 74
23 Transmission control characters 79
24 Pump operation commands 87
25 Command list 92
26 Pump operation commands 94
27 Error message values 96
28 Error message values (continued) 97
29 Pump operation mode 99
30 Remote mode 104
31 Warning value bit assign 108
32 Parameter setting value 114
33 Option function number and parameter list 125
34 Option function number and parameter list 127
35 Functions of STP-Link 129