STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page 118
5
SERIAL COMMUNICATION PROTOCOL
Refer to Table 32, "Parameter setting value" for each parameter setting value.
The value is not reflected when a parameter is out of a setting range.
Example:
1. Input operation port: 01
hex
= I/O REMOTE
2. TMS Option: FF
hex
= DISABLE
4. Vent valve: 00
hex
= ENABLE
5. Vent valve starting speed: 32
hex
= 50 %
6. Vent valve running time: 003C
hex
= 60 sec.
7. Air-cooling fan: FF
hex
= DISABLE
8. Second Damage Limit Option: 00
hex
= ENABLE
9. First Damage Limit Warning: 00
hex
= ENABLE
10. Pump Runtime Over Warning: FF
hex
= DISABLE
11. Pump Runtime Over Warning hours: 000003E8
hex
= 1,000 (×100 hours)
12. Imbalance Warning: 00
hex
= ENABLE
13. Pump Overload Warning: FF
hex
= DISABLE
14. Pump Overload Warning Motor current: 03E8
hex
= 1,000 (×0.1%)
15. Pump Overload Warning Rotational speed: 0000
hex
= 0 (×0.1%)
16. Serial communication time out: 003Chex = 60 sec.
17. PROG OUT pin: 01
hex
= ROTATION
18. PROG IN pin: 02
hex
= RESET/2
nd
SPEED EN
Parameter
1 2 3 4 5 6 7 8 9
ASCII 0
1
F
F
*1
*1
0
0
3
2
0
0
3
C
F
F
0
0
0
0
HEX 30
31
46
46
30
30
33
32
30
30
33
43
46
46
30
30
30
30
Parameter
10 11 12
ASCII F
F
0
0
0
0
0
3
E
8
0
0
HEX 46
46
30
30
30
30
30
33
45
38
30
30
Parameter
13 14 15 16 17 18 19
ASCII F
F
0
3
E
8
0
0
0
0
0
0
3
C
0
1
0
2
*1
*1
HEX 46
46
30
33
45
38
30
30
30
30
30
30
33
43
30
31
30
32
Parameter
19
ASCII
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
*1
HEX
*1 Assign Fhex or the reading data of ReadOptionFunc (?=).
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