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Edwards STP-iX457 Series - Page 6

Edwards STP-iX457 Series
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STP-iX457/iXU457 Series Turbomolecular Pump
MT-86E-001-F
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
7.1.3 Abnormal state of magnetic bearing (Disturbance) 133
7.1.4 Excessive vibration (Disturbance) 133
7.1.5 Motor driver overload (DRV Overload) 133
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 133
7.1.7 Overheating inside the control unit (CNT Overheat) 133
7.1.8 Overspeed 134
7.2 "WARNING" function 134
7.2.1 "WARNING" function 134
7.3 Contents of WARNING function 135
7.3.1 First Damage limit 135
7.3.2 Second Damage Limit 135
7.3.3 Pump run time over 135
7.3.4 Pump Overload 136
7.3.5 Imbalance 136
7.3.6 Other Warning 136
7.4 WARNING function setting 137
7.5 Troubleshooting immediately after failure occurs 138
7.5.1 After power failure 138
7.5.2 After other abnormality/error 138
7.6 Troubleshooting 139
7.6.1 Indication of "STATUS" LED (red flash) 139
7.6.2 Indication of "STATUS" LED (green and red alternately) 145
7.6.3 No Indication of the "STATUS" LED (red) 145
8 MAINTENANCE AND INSPECTION 143
8.1 Maintenance and inspection 143
8.2 Cleaning 144
8.3 Inspecting the deposit 144
8.4 Maintenance 145
8.4.1 Recommended overhaul intervals 145
8.4.2 Standard replacement parts 145
8.4.3 Recommended maintenance intervals for main parts 146
8.5 Transporting for repair or overhaul 147
9 STORAGE AND DISPOSAL 153
9.1 Storage of the STP pump 153
9.2 Disposal 154
10 SERVICE, SPARES AND ACCESSORIES 151
10.1 Introduction 151
10.2 Service 151
10.3 Spares 151
10.4 Accessories 152

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