7-16 
O2 Branch Flow 
Not Achieved 
Low 
The O2 flow exceeds 
the target flow by 10% 
or 0.2 L/min, whichever 
is larger.   
1. Check whether O2 is supplied 
normally. The gas supply pressure on 
the O2 pipeline should be within the 
range of 280- 600kPa (40-87PSI), 
and the cylinder pressure should be 
within the range of 6.9-20.0MPa 
(1000-2900PSI). 
2. Check whether the sensor or valve 
is faulty by referring to 7.6.5.1. 
3. If the sensor is faulty, replace the 
flow sensor (refer to 11.3.1). 
4. If the valve is faulty, replace the 
electronic flowmeter (refer to 
Balance Gas 
Branch Flow Not 
Achieved 
Low 
The balance gas flow 
exceeds the target flow 
by 20% or 0.4 L/min, 
whichever is larger. 
1. Check whether the balance gas is 
supplied normally. The gas supply 
pressure on the AIR pipeline should 
be within the range of 280- 600kPa 
(40-87PSI), and the cylinder pressure 
should be within the range of 
6.9-20.0MPa (1000-2900PSI). The 
gas supply pressure on the AIR 
pipeline should be within the range of 
280- 600kPa (40-87PSI), and the 
cylinder pressure should be within the 
range of 4.2-6.0MPa(600-870PSI). 
2. Check whether the sensor or valve 
is faulty by referring to 7.6.5.1. 
3. If the sensor is faulty, replace the 
flow sensor (refer to 11.3.1). 
4. If the valve is faulty, replace the 
electronic flowmeter (refer to 
Flowmeter Comm 
Stop 
Med 
The CPU board fails to 
communicate with the 
electronic flowmeter 
board for 10s, or 
the EFCS CPU fails to 
communicate with the 
EFCS-PM or VCM for 
10s. 
2. If the status screen has a 
communication stop alarm, or 
encounters the black or blank screen 
error, rectify the fault of the status 
screen first (refer to 7.2.1). 
3. If the problem persists, open the 
service door (refer to 8.1.1), and 
reconnect the cable between the 
backplane and the flowmeter 
assembly. (For the cable position, 
refer to 8.12.) 
4. If the problem persists, replace the 
electronic flowmeter board (refer to 
Self Test Time Out 
Total Flow Sensor 
Med 
EFCS-PM fail to 
communicate with the 
2. If the problem persists, reconnect 
the cable of the flow sensor (refer to