7-53 
Cause Confirmation 
Solution 
board and its cables (refer to 
11.4.1). 
The vaporizer 
cannot be started. 
Proceed with step 3 to 
continue with the check. 
3. After the vaporizer is 
installed in place, select 
Setup > Service > Data 
Monitors > Status Monitor 
to access the data 
monitoring screen and check 
the vaporizer status. 
The vaporizer 
status is ON. 
Replace the electronic 
vaporizer. 
The vaporizer 
status is OFF. 
(1) Replace the electronic 
vaporizer. 
(2) Replace the electronic 
vaporizer base interface 
board and its cables (refer to 
11.4.1). 
(2) If the problem persists, 
replace the monitoring and 
controlling assembly (refer 
Vaporizer 
activation failure 
with successful 
self-test 
1. Check whether the gas 
supply is sufficient. 
pressure is less than 
Connect or replace the gas 
supply. 
pressure is greater 
than 280 kPa (40 
Proceed with step 2. 
2. Install the electronic 
vaporizer in another slot and 
try to activate it. 
The vaporizer can 
be activated. 
vaporizer base interface 
board and its cables (refer to 
The vaporizer 
cannot be activated. 
Proceed with step 3 to 
continue with the check. 
3. Without connecting the 
vaporizer, set the drive gas 
3-way valve to ON, observe 
the status signal of the drive 
gas 3-way valve on the left 
the UI, and check whether 
drive gas is output from the 
manifold connector (refer to 
4.6.6). 
drive gas 3-way 
valve is ON, but no 
Replace the vaporizer base 
valve assembly (refer to 
11.4.1). 
drive gas 3-way 
valve is ON, and 
Proceed with step 4. 
drive gas 3-way 
Replace the vaporizer base 
valve assembly (refer to 
4. Connect the vaporizer. 
Check whether the value of 
the pressure sensor is 0 
when the drive gas 3-way 
valve is set to OFF and is 
within 150±5 kPa (22±0.7 
psi) when the drive gas 
3-way valve is set to ON 
pressure sensor is 
within 150±5 kPa 
Replace the electronic 
vaporizer. 
The value of the 
pressure sensor is 
beyond 150±5 kPa 
(22±0.7 psi). 
Proceed with step 5. 
5 Open the service door 
(refer to 8.1.1) and measure 
The output pressure 
is within 150±5 
Replace the electronic 
vaporizer.