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7
H
(
s
S
t
S
c
(t
h
p
a
T
o
(
s
T
h
7
.2.1.6.
H
ereafter, th
e
s
tandard gr
a
t
artin
g
me
a
c
anning of
h
e sample
h
a
rameters h
o
start sca
n
s
ee Fig. 7-5
9
h
is results i
Line-by-
l
scan are
a
Scanni
n
e
scanning
p
a
ting TGQ-
1
a
surement
s
the sampl
e
h
as approa
c
ave been s
e
n
ning, clic
k
9
).
F
n the follo
w
l
ine scanni
n
a
appears in
n
g
p
rocess wil
1
, 3 μm res
o
s
e
surface s
h
c
hed to the
e
t).
k
the
Run
F
ig. 7-59. Co
w
ing activit
y
n
g of the s
a
the 2D Vie
Fig. 7-
6
l be explai
n
o
lution).
h
ould be pr
e
probe, the
b
utton in
t
ntrol panel
o
y
of the sys
a
mple surfa
c
wer of the
s
6
0. Surface
t
C
n
ed with th
e
e
ceded by
n
operation
p
t
he Control
o
f the Scann
te
m
:
c
e starts an
s
can data (s
t
opography i
m
C
hapter 7. P
e
e
example
o
n
ecessary
p
p
oint is adj
u
panel of
t
in
g
window
d the corre
s
ee Fig. 7-6
0
m
age
e
rforming M
e
o
f a rectang
u
p
reparation
u
sted, and
a
t
he
Scanni
n
s
ponding i
m
0
);
e
asurement
s
9
7
u
lar gratin
g
procedure
s
a
ll scannin
g
ng
windo
w
m
age of th
e
s
7
g
s
g
w
e

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