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Edwards SCU-1601 User Manual

Edwards SCU-1601
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SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page v
PAGE
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ILLUSTRATIONS
Figure Title Page
1 High voltage device caution label 4
2 Safety instruction label 4
3 Caution label 4
4 Connector caution label 5
5 Voltage rating label 5
6 Applicable pump model label 5
7 Label affixing positions 6
8 SCU-1601 control unit 7
9 Configuration of the STP pump with the TMS 8
10 System configuration (with outlet port heater) 9
11 SCU-1601 dimensions (mm) 13
12 SCU-1601 front panel 15
13 SCU-1601 rear panel 18
14 Installing the SCU-1601 20
15 Example of securing the SCU-1601 21
16 STP pump connection cable 23
17 STC-U remote branch cable 24
18 STC-U remote cable 25
19 Power extension cable 26
20 Power cable (without plug) 27
21 Power cable (with plug) 28
22 Connecting method of the power cable without plug 29
23 X7 REMOTE connector 31
24 Connector X3A, X3B (D-sub 9) 31
25 Tuning procedures 34
26 Confirmation mode 37
27 Error Detailed Information 38
28 Parameter setting method 44
29 Parameter setting method (continued) 45
30 Parameter setting method (continued) 46
31 Parameter setting method (continued) 47
32 Parameter setting method(continued) 48
33 Network parameter setting 49
34 Manual operation method 51
35 Operational procedures 57
36 X7 REMOTE input signal pins 61
37 X7 REMOTE output signal pins 65
38 Serial communication 73
39 Connector X3A/X3B (D-sub 9) 74
40 Connector X7 (D-sub 37) 75
41 RS485 connections 76
42 FAILSAFE bias resistance 77
43 Grounding example (Both ends grounding) 79
44 Grounding example (single point grounding) 79
45 Example of ring ferrite core installation 80
46 Example of cable installation in metallic duct 80
47 Example of differential signal waveform 81
48 PC to SIM communication 82
49 Block diagram of communication process example 92
50 Example of answer resending process 93

Table of Contents

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Edwards SCU-1601 Specifications

General IconGeneral
BrandEdwards
ModelSCU-1601
CategoryControl Unit
LanguageEnglish

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