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Edwards STP-iS1607 Series User Manual

Edwards STP-iS1607 Series
173 pages
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STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page viii
PAGE
viii
TABLES
Table Title Page
1 Environmental requirements for installation 22
2 Eye nut size 25
3 Pump functions 29
4 Control unit front panel functions 32
5 Control unit front panel functions (continued) 33
6 Tightening torque of bolt 37
7 Maximum torque predicted
and recommended securing bolt for inlet port flange 38
8 Power cable 43
9 Starting/stopping the STP pump (X2 REMOTE) 58
10 Reset Operation (X2 REMOTE) 59
11 LED Indications for each state 60
12 X2 REMOTE input signal pins 62
13 Second speed function 65
14 X2 REMOTE output signal pins 67
15 Rated contacts for relays 69
16 X3 pin position 72
17 Communication parameters 75
18 Input operation port 76
19 Serial communication time out setting 77
20 Transmission control characters 82
21 Pump operation commands 90
22 Command list 95
23 Pump operation commands 97
24 Error message values 99
25 Error message values (continued) 100
26 Pump operation mode 102
27 Remote mode 107
28 Warning value bit assign 111
29 Parameter setting value 116
30 Option function number and parameter list 126
31 Option function number and parameter list 128
32 Functions of STP-Link 131
33 States of LEDs and X2 REMOTE output signals
at power failure 134
34 WARNING function 136
35 Default setting of WARNING function 140
36 Factory Setting and Variable Range 140
37 Priority of failure signal 142
38 Error List 143
39 Error List (continued) 144
40 Error List (continued) 145
41 Error List (continued) 146
42 Error List (continued) 147
43 Troubleshooting with no indication of the "FAILURE" LED 148

Table of Contents

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Edwards STP-iS1607 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iS1607 Series
CategoryWater Pump
LanguageEnglish

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