Sample Application Programs
Time Dependent Dielectric Breakdown (TDDB)
Customization
Measurement setup le is stored in \TDDB.MES" le on provided diskette.In
the TDDB.MES le, the following is set up.You can modify these settings
in the TDDB.MES le or your own le, then use the setup for your own
application.
Constant source setup
Units Output Compliance
SMU1 (Gate)
20 V 1.001
A
SMU4 (Substrate)
0V 100
A
Sampling Parameters
Mode Initial interval No. of samples Total samp. time
Thinned-out 100 ms 1001 999.9 s
Stop Condition
This setup is used to judge the oxide breakdown. If gate current exceeds
the specied threshold, measurement is stopped.
Enable Delay Threshold
200 ms 1
A
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