No. 99MBG127A
Contents
CONVENTIONS USED IN THIS MANUAL ........................................................................................................ i
Labels on Product .......................................................................................................................................... iii
LED Safety Precautions ................................................................................................................................. iv
Electromagnetic Compatibility (EMC) ............................................................................................................ v
Precautions for Use ........................................................................................................................................ vi
Warranty........................................................................................................................................................... ix
Disclaimer ......................................................................................................................................................... x
Export Control Compliance ........................................................................................................................... xi
Notes on Export to EU Member Countries ................................................................................................... xi
Disposal of Old Electrical & Electronic Equipment (Applicable in the European Union and other
European countries with separate collection systems) ............................................................................. xi
1 Manual main unit .................................................................................................................................. 1-1
1.1 Overview of the Manual main unit ............................................................................................... 1-1
1.2 Standard configuration of Manual main unit .............................................................................. 1-2
1.3 Parts name ..................................................................................................................................... 1-3
1.3.1 Manual main unit .................................................................................................................... 1-3
1.3.2 Back panel of Manumal main unit ........................................................................................ 1-3
1.3.3 Touch panel ............................................................................................................................ 1-4
1.3.4 Manual XY stage unit ............................................................................................................. 1-4
2 Installation ............................................................................................................................................. 2-1
2.1 Installation environment ............................................................................................................... 2-1
2.1.1 Temperature ............................................................................................................................ 2-1
2.1.2 Humidity .................................................................................................................................. 2-1
2.1.3 Vibration .................................................................................................................................. 2-1
2.1.4 Wind, Sound ........................................................................................................................... 2-3
2.1.5 Dust ......................................................................................................................................... 2-4
2.1.6 Power supply .......................................................................................................................... 2-4
2.2 Installation space ........................................................................................................................... 2-5
3 Preparation for the test ........................................................................................................................ 3-1
3.1 Leveling .......................................................................................................................................... 3-1
3.2 Parts installation and connection ................................................................................................ 3-3
3.2.1 Mounting the Manual XY stage ............................................................................................. 3-3
3.2.2 Adjusting aperture diaphragm.............................................................................................. 3-5
4 Hardness test procedure ..................................................................................................................... 4-1
4.1 Hardness test ................................................................................................................................. 4-1