MKS 937B - Page 29

MKS 937B Operation Manual
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Active Filament
Emission current
Protect setpoint
Relay setpoint, direction and hysteresis
Control setpoint Channel, setpoint and hysteresis
PR/CP Gas Type
Factory Default
Auto Zero
Manual Zero
ATM value and calibration
Relay setpoint, direction and hysteresis
CM & FC Range
Factory Default
Auto Zero
Manual Zero
Relay setpoint, direction and hysteresis
8. Set MFC Ratio Ctrl
MFC Ratio Ctrl is available only when one or more MFC boards are present in the
937B. To set MFCs to ratio control mode, change the Set MFC Ratio Ctrl parameter
OFF to ON, then, press
Enter
, the ratio control setup screen will be displayed as
shown in Figure 6-14. For a more detailed discussion of the settings for ratio control,
please refer to section 6.8.2.
9. Set Combination Ch
There are two combination channels available in the 937B. Up to 3 vacuum pressure
sensors can be assigned to each combination channel.
To view or change the combination channel settings, set the Set Combination Ch
parameter to ON and press
Enter
. Refer to section 8.4 for a more detailed discussion
of the settings for the combination channels.
10. System FV Information
The system firmware information for all of the modules installed in the 937B is
displayed when ON is selected. The serial numbers for all detected boards are also
displayed, as shown in Figure 6-5.