MKS 937B - Page 32

MKS 937B Operation Manual
32
Channel
Setup
Gas Type
Factory Default
Manual Zero
N2
NO
Auto Zero
NO
A1
Relay Relay n
NO
YES
Enable
DIR
SET SP
Hyst
OFF
BELOW
1.0E+00
1.5E+00
NA
Ion gauge Channel
Message
Display 2 Relays, Ch# auto detected
ON
OFF
ABOVE
BELOW
Display warning message
ATM Value
ATM Cal
760
NO
N2
Ar
He
User Calibration 1.0
AO Delay
Relay Relay n
Enable
DIR
SET SP
Hyst
OFF
BELOW
1.0E-05
1.5E-05
Display 4 Relays, Ch# auto detected
ON
OFF
BELOW
Control SP
N2
Ar
He
5.0E-03
ON
OFF
Enable
CH
SET SP
Hyst
OFF
B1
2.0E-03
3.0E-03
Pirani/CP Channel or NA, auto-detected
Gas Type N2
0.1 to 50
1.00
Protect SP
Relay Relay n
Enable
DIR
SET SP
Hyst
OFF
BELOW
1.0E-05
1.5E-05
Display 4 Relays, Ch# auto detected
ON
OFF
BELOW
Control SP
N2
Ar
He
5.0E-03
ON
OFF
Enable
CH
SET SP
Hyst
OFF
B1
1.0E-03
1.5E-03
Pirani/CP Channel or NA, auto-detected
Gas Type N2
Gauge Correction factor 0.1 to 50
DG Time 30
Sensitivity 9.0
Filament 1
EC Auto
5 to 20
1-240 min
Auto, 20uA
CUST
1x10
-5
to 1x10
-2
torr
1x10
-5
to 1x10
-2
Torr
Pirani
and CP
Cold
cathode
Hot
cathode
Protect SP
3
3 to 300 Sec
1, 2
2x10
-3
to 9.5x10
+1
torr for PR
2x10
-3
to 9.5x10
+2
torr for CP
2x10
-10
to 5.0x10
-3
torr
5x10
-4
to 5x10
-3
torr for PR
2x10
-3
to 5x10
-3
torr for CP
5x10
-10
to 5.0x10
-3
torr
5x10
-4
to 5x10
-3
torr for PR
2x10
-3
to 5x10
-3
torr for CP