MKS 937B - Page 56

MKS 937B Operation Manual
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and the default value is 10 seconds. If 0 is entered, the Softstart feature is
disabled.
Note that the start position (or setpoint) for Softstart is always zero. Therefore,
Softstart process will not be executed if Base parameter is greater than 0.
 Direction: Direction sets the valve control to either Upstream or Downstream.
When a throttle valve is used, the Direction must be set to Downstream. When
MFC is used, it is automatically set to Upstream.
5. Edit
Edit is used to edit flow and pressure PID control in the recipe. There are 8 user
defined recipes available. Multiple recipes can be assigned to a single channel.
When Yes is pressed, the LCD display screen changes to that shown in Figure 6-13.
Corresponding MFC/Vlv/Rat channels (such as A1 under R1) are indicated under the
recipe title (such as R1). This provides a brief overview of the control channels
assigned to the recipes. Aside from the available channel numbers (i.e A1, A2, etc.),
there are three special channel names: Vls, Rat, and NA:
Vlv denotes the valve control channel;
Rat represents the MFC ratio control channel and
NA signifies recipes that have not yet been assigned a control channel.
The following example illustrates how to access the R3 recipe.
i. In channel setup screen as shown in Figure 6-12, change the Edit parameter
to ON, and pressure
Enter
button to enter the scan mode of the Recipe
Setup.
ii. After moving the cursor to R3 (as shown in Figure 6-13 (a)), press the Enter
key; the text box will be highlighted, and this enters the edit mode for the
Recipe Setup screen.
iii. All 11 parameters corresponding to the recipe R3 are displayed on the
screen as shown in Figure 6-13.
iv. Select the appropriate parameter for PID CH such as C1 in this example.
You need to move the cursor to the test box on the right-hand side of the PID
CH test box, press
Enter
to enter edit mode for changing this parameter,
then, use
or keys to select appropriate value, and press
Enter
again
to save the value. Once the new parameter value is saved, the parameter
under R3 test box will change correspondingly. Note that this parameter can
only be modified in the text box to the right of the PID CH title box.
v. To modify a parameter value, move the cursor to the corresponding box,
press the Enter key to highlight it and then press the up/down arrow keys to
change the value. Once the parameter value has been modified, press Enter
again to save the value.
vi. To view or edit other recipe, you need to press
ESC
key to go back to the
recipe scan mode where you can select different recipe as described in step
i.
6. Relay