Chapter 3 Gas-Flow Controller
GC-2014 Service Manual
35
3.1.2 Manual Flow Controller
3.1.2.1 FID
N BELLOW VALVE, 2K, WITH RESISTANCE
SPEED CONTROLLER, ASN2-M5
RUBBER PLUG, INJECTION PORT, SILICONE
29
32 S221-19503-08
MARK BAND A
RESISTANCE TUBE, AIR, GC-8AF
PIPE, PG-MF-MF ASSY
RESISTANCE TUBE, HYDROGEN, GC-8A
PIPE, PG-MF-MF-MMASS
MARK BAND H