Chapter 3 Gas-Flow Controller
GC-2014 Service Manual
43
3.1.3.2 2ch APC
APC_FPD (Assembly Configuration Chart)
S221-73342-43
S221-48813-91
PIPING ASSY, FPD, OUT
FLOW BOARD ASSY, APC2
PCB ASSY, FPD PCB APC ASSY, 2CH
PIPING ASSY, FPD, IN
3.1.3.3 1ch APC
APC_ECD (Assembly Configuration Chart)
S221-73342-42
S221-48813-91
PIPING ASSY, ECD, INLET
FLOW BOARD ASSY, APC2
PCB ASSY, MAKEUP PCB APC ASSY, 1CH
PIPING ASSY, ECD, OUT