MKS 937B - Page 13

MKS 937B Operation Manual
13
Response time (Log/Lin analog output)
CC <50 msec
HC <50 msec
Pirani, CP <80 msec
CM <80 msec
Resolution
7
CC & HC 2 significant digits between 10
-10
and 10
-3
Torr, 1 significant
digit in 10
-11
and 10
-2
Torr decades
Pirani 2 significant digits between 10
-3
and 99 Torr, 1 significant
digit elsewhere within the gauge’s range
CP 2 significant digits
CM & FC 4 significant digits
Repeatability
CC, HC, Pirani, CP 5% of indicated pressure at constant temperature
CM 0.25% of indicated pressure at constant temperature
FC 0.2% of full scale
Calibration gas
CC, HC Nitrogen, Argon
Pirani, CP Air/nitrogen, Argon, Helium
CM Any (gas independent)
FC Nitrogen
Installation orientation
CC, HC, CM, Pirani, FC Any (port down suggested for pressure sensor)
CP Body horizontal only
Materials exposed to vacuum may include
CC Series 421 and 422 – SS 304, Al 6061, silver-copper brazing
alloy, alumina ceramic, Elgiloy
®
, OFHC
®
copper
Series 423 – SS 302, SS 304, glass, Al, Inconel X-750
®
,
alumina ceramic
HC 304 SS, Inconel
®
X750, glass, tungsten, platinum clad
molybdenum, tantalum, nickel, braze alloy, either yttria
coated iridium or tungsten filament
Pirani 300 series stainless, platinum, alumina ceramic, silver
brazing alloy, nickel 200
7
Trailing zeros displayed on LCD screen do not reflect the resolution of the pressure reading.